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+\documentclass[tikz]{standalone}
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+\usetikzlibrary{
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+ calc,
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+ positioning
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+}
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+\usepackage{beamerarticle}
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+\definecolor{stdcolor}{RGB}{0,164,164}
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+\begin{document}
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+\begin{tikzpicture}[scale=0.3,
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+ dreieck/.style={isosceles triangle, shape border rotate=90,anchor=apex,
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+ isosceles triangle apex angle=80},
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+ farbe1/.style={fill=refa!20},
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+ farbe2/.style={fill=refa!40},
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+ r/.style={rectangle,minimum width=2cm, minimum height=3cm, label=south:#1,node distance=1cm},
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+ s/.style={signal,signal from=west,signal pointer angle=120,minimum height=1cm,},
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+ p/.style={s,minimum width=10cm,node distance=0.25cm,draw},
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+ sp/.style={s,minimum width=2cm,node distance=0cm},
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+ a/.style={rectangle,minimum width=2cm, minimum height=3cm,node distance=0.5cm,text width=2cm,align=center},
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+ ]
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+\visible<+->{\node (ga) [a,fill=gray] {Gesamt-\\ablauf};};
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+\visible<+->{\node (ta) [a,right=of ga,fill=gray!85] {Teil-\\<all>ablauf};};
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+\visible<+->{\node (as) [a,right=of ta,fill=gray!70] {Ablauf-\\<all>stufe};};
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+\visible<+->{\node (v) [a,right=of as,fill=gray!55] {Vorgang};};
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+\visible<+->{\node (tv) [a,right=of v,fill=gray!40] {Teilvorgang};};
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+\visible<+->{\node (vs) [a,right=of tv,fill=gray!25] {Vorgangs-\\<all>stufe};};
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+\visible<+->{\node (ve) [a,right=of vs,fill=gray!10] {Vorgangs-\\element};};
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+\coordinate (p1) at ([yshift=1cm]ga.north west);
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+\coordinate (p2) at ([yshift=5cm]v.north east);
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+\visible<+->{\path [fill=stdcolor!20,name=p] (p1) rectangle (p2);
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+\node [align=center] at ($(p1) !.5!(p2)$) {Makroablaufabschnitte\\\bfseries{\Large{Prozesse}}};
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+};
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+
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+\coordinate (a1) at ([yshift=-1cm]v.south west);
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+\coordinate (a2) at ([yshift=-5cm]ve.south east);
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+
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+\visible<+->{
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+\path [fill=stdcolor!20,name=a] (a1) rectangle (a2);
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+\node [align=center] at ($(a1) !.5!(a2)$) {\bfseries{\Large{Arbeitssystem}}\\Mikroablaufabschnitte};
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+};
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+\end{tikzpicture}
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+\end{document}
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